JPH0250985B2 - - Google Patents
Info
- Publication number
- JPH0250985B2 JPH0250985B2 JP12271785A JP12271785A JPH0250985B2 JP H0250985 B2 JPH0250985 B2 JP H0250985B2 JP 12271785 A JP12271785 A JP 12271785A JP 12271785 A JP12271785 A JP 12271785A JP H0250985 B2 JPH0250985 B2 JP H0250985B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine particle
- film
- chamber
- film forming
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011882 ultra-fine particle Substances 0.000 claims description 56
- 238000010438 heat treatment Methods 0.000 claims description 36
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 230000005855 radiation Effects 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 46
- 239000007789 gas Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12271785A JPS61281866A (ja) | 1985-06-07 | 1985-06-07 | 超微粒子ビ−ムを用いた膜形成法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12271785A JPS61281866A (ja) | 1985-06-07 | 1985-06-07 | 超微粒子ビ−ムを用いた膜形成法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61281866A JPS61281866A (ja) | 1986-12-12 |
| JPH0250985B2 true JPH0250985B2 (en]) | 1990-11-06 |
Family
ID=14842848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12271785A Granted JPS61281866A (ja) | 1985-06-07 | 1985-06-07 | 超微粒子ビ−ムを用いた膜形成法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61281866A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425175U (en]) * | 1990-06-25 | 1992-02-28 |
-
1985
- 1985-06-07 JP JP12271785A patent/JPS61281866A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425175U (en]) * | 1990-06-25 | 1992-02-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61281866A (ja) | 1986-12-12 |
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